Thickness-Shear Vibration of a Circular Crystal Plate in a Cylindrical Shell as a Pressure Sensor
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摘要: 以电弹性体中叠加于偏场之上的小增量场理论为基础,研究了固定在圆柱壳中的圆盘状晶体谐振器的厚度剪切振动问题,得到了环境压力所诱导的谐振器频率漂移的表达式,该表达式可用于指导压力传感器的优化设计.数值结果表明:频率漂移与环境压力成正比,并且外壳的刚度越小或者压电晶片与外壳厚度之比越小,则压力传感器的灵敏度越高.Abstract: Based on the theory for small fields superposed on relatively larger fields in an electroelastic body,a theoretical analysis was performed on a circular plate thickness-shear crystal resonator sealed in a circular cylindrical shell for pressure measurement.A simple expression is obtained for pressure induced frequency shifts in the resonator,which is examined for design optimization.Numerical results show that the frequency shifts depend linearly on the pressure,and that a pressure sensor with a softer outer shell or a smaller thickness ratio of the crystal plate to the outer shell has higher sensitivity.
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Key words:
- pressure sensor /
- resonator /
- biasing field /
- incremental field /
- frequency shift
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