高灵敏度柔性多层等强度梁式力/位移传感器设计及传感理论研究

倪娜; 叶智鹏; 李东波; 赵冬

doi:10.21656/1000-0887.450063

高灵敏度柔性多层等强度梁式力/位移传感器设计及传感理论研究

doi: 10.21656/1000-0887.450063

西安建筑科技大学理学院，西安 710055

(我刊编委刘少宝推荐)

基金项目:

陕西省自然科学基础研究计划(面上项目) 2023-JC-YB-059

陕西省自然科学基础研究计划(面上项目) 2023-JC-YB-060

详细信息

作者简介:
倪娜(1987—)，女，副教授，博士，硕士生导师(E-mail: nina@xauat.edu.cn)

通讯作者:
李东波(1982—)，男，教授，博士，博士生导师(通讯作者. E-mail: ldb@xauat.edu.cn)

中图分类号: TP212;O34
计量
- 文章访问数: 115
- HTML全文浏览量: 45
- PDF下载量: 22
- 被引次数: 0
出版历程
- 收稿日期: 2024-03-11
- 修回日期: 2024-05-08
- 刊出日期: 2024-06-01

Design and Sensing Theory for Flexible Multi-Layer Equal Strength Beam Force/Displacement Sensors With High Sensitivity

School of Science, Xi'an University of Architecture and Technology, Xi'an 710055, P.R.China

(Recommended by LIU Shaobao, M. AMM Editorial Board)

摘要

摘要:
针对目前柔性传感器大多数结构为薄膜形式，不利于法向集中力与位移同时测量的问题，设计并制备了一种基于多层离子皮肤(柔性电容传感片)的等强度梁式传感器. 该触觉传感器由多层离子皮肤和等强度梁构成. 当梁的自由端接触被测物时，传感器可以将力或位移转化为输出的电容信号来进行法向接触力或位移的测量. 建立了传感器电容变化量与梁自由端力/位移关系的传感理论模型，并通过力/位移加载试验对传感理论模型进行验证. 试验结果表明，传感器的传感理论模型与试验结果吻合较好，当传感器具有四层结构时，对力/位移测量的灵敏度分别为1.855 mN/pF和0.694 mm/pF. 所能测得最小力为0.02 mN，最小位移为0.01 mm，同时该传感器表现出良好线性度(R²=0.994). 该传感理论模型可为此类传感器的设计提供理论依据，在柔性机器和医疗健康检测等领域具有良好的应用前景.
- 柔性传感器 /
- 等强度悬臂梁 /
- 位移 /
- 力
Abstract:
An equal-strength cantilever beam sensor based on the multi-layer ionic skin (flexible capacitance sensor chips) was designed and prepared, to solve the problem that most existing thin-film-structure flexible sensors cannot simultaneously measure concentrated normal forces and displacements. The proposed sensor is comprised of the multi-layer ionic skin and the equal-strength cantilever beam. The normal contact forces or displacements can be acquired through measurement of the capacitance change of the sensor, with the free end of the beam contacting the measured object. A theoretical sensing model of the relationship between capacitance change and force/displacement was established and then verified through displacement/force loading tests. The test results show that, the sensing model is in good agreement with the test data. For the measurement of force and displacement, the sensitivity of the sensor with a 4-layer structure is 1.855 mN/pF and 0.694 mm/pF, respectively. The minimum measurable force is 0.02 mN and the minimum measurable displacement is 0.01 mm. At the same time, the sensor shows good linearity (R²=0.994). This sensing model provides a theoretical basis for the design of such sensors with good application prospects in the fields of flexible machines and medical health detection.
- flexible sensor /
- equal strength cantilever beam /
- displacement /
- force
edited-by

edited-by
注释:

1) (我刊编委刘少宝推荐)

HTML全文

图 1 基于双层电容传感片的等强度梁式力/位移传感器结构示意图

Figure 1. A force/displacement sensor based on a variable cross-section cantilever beam with the double-layer capacitive sensing chip

下载: 全尺寸图片幻灯片

图 2 单轴拉伸时单层电容传感片的变形示意图

Figure 2. Schematic diagram of the deformation of a single-layer capacitive sensing chip under uniaxial stretching

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图 3 传感器的几何示意图

Figure 3. Geometry of the sensor

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图 4 具有不同层数传感片的传感器

Figure 4. The sensors with different-layer sensing chips

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图 5 试验装置示意图

Figure 5. Schematic diagram of the test instrument

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图 6 不同层数传感器电容变化量与力的关系

Figure 6. The relationships between capacitance changes and forces with different-layer capacitive sensing chips

下载: 全尺寸图片幻灯片

图 7 不同层数传感器电容变化量与位移关系

Figure 7. The relationships between capacitance changes and displacements with different-layer capacitance sensing chips

下载: 全尺寸图片幻灯片

图 8 最小力测试

Figure 8. The test of the minimum force

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图 9 最小位移测试

Figure 9. Test of minimum displacement

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表 1 不同传感器可测量的最小力对比

Table 1. Minimum detectable forces with different sensor types

source	type	minimum detectable force
ref. [27]	capacitance sensor	0.07 N
ref. [28]	capacitance sensor	0.01 N
ref. [29]	capacitance sensor	0.009 N
ref. [30]	capacitance sensor	0.05 mN
ref. [20]	fiber Bragg grating sensor	0.011 N
ref. [31]	piezoresistive sensor	0.08 N
ref. [32]	piezoelectric sensor	0.05 N
ref. [33]	optical sensor	0.52 mN
this work	capacitance sensor	0.02 mN

下载: 导出CSV

表 2 不同传感器所探测到的最小位移对比

Table 2. Minimum detectable displacements with different sensor types

source	types	minimumlimit of force detection
ref. [20]	fiber Bragg grating sensor	0.005 mm
ref. [34]	fiber Bragg grating sensor	0.01 nm
ref. [35]	flexible ultrasonic sensor	0.01 mm
this work	flexible capacitance sensor	0.01 mm

下载: 导出CSV

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