Micro-Nano Mechanical Properties and Piezoresistive Behaviors of High-Temperature Sensing Amorphous SiCN Ceramics
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摘要: 数字孪生技术通过构建高精度虚拟模型，结合实时数据获取和仿真分析，在高温热端部件的设计、运行和维护过程中具有重要意义.耐高温、高灵敏度、高稳定性的传感器是数据获取并提供高温部件运行状态精准映射的关键.该文以PSN1型聚硅氮烷为前驱体，采用液态模塑成型方法制备致密非晶SiCN陶瓷，并系统研究了热解温度对其微观结构演化以及微纳力学性能、压阻特性的影响.研究表明，随着热解温度的升高，非晶SiCN的密度以及结构中自由碳相的有序度逐渐增加.在1 000~1 200 ℃热解温度范围内，密度的增加作为主导因素显著提升其弹性模量、硬度以及蠕变应力指数.当温度进一步升至1 300 ℃，sp2自由碳结构的有序化作为主导因素，增加了非晶SiCN的变形能力，引起弹性模量、硬度和蠕变应力指数的降低.此外，自由碳导电相的有序化显著提升了非晶SiCN的电导率，经1 300 ℃热解的非晶SiCN表现出最高的压阻系数(310~416)，对应电阻值随应力变化呈先急剧下降后趋于平缓的趋势.该材料在900 ℃高温环境下仍具有良好的压阻性能和稳定性，表明了其在高温压力传感器领域的应用潜力.Abstract: The digital twin technology, utilizing the high-precision virtual modeling and the real-time data acquisition, plays a crucial role in the design, operation, and maintenance of high-temperature components. Robust, sensitive and stable sensors are indispensable for precisely characterizing the operational status of these components. The dense amorphous SiCN ceramics was fabricated through liquid molding of the polysilazane (PSN1) precursor, and the pyrolysis temperature effects on the microstructural evolution, the micro-nano mechanical properties and the piezoresistive response were investigated. The results demonstrate that, with the increase of the pyrolysis temperature, the amorphous SiCN density and the structural free carbon phase degree of order will gradually rise. Within the pyrolysis temperature range of 1 000~1 200 ℃, the density increase as the dominant factor markedly augments the elastic modulus, the hardness, and the creep index. At a temperature up to 1 300 ℃, the free carbon structure orderliness as the dominant factor enhances the deformation ability of the amorphous SiCN, resulting in decreases of the elastic modulus, the hardness and the creep index. Furthermore, the orderliness of the free carbon conducting phase significantly promotes the electrical conductivity of the amorphous SiCN. The amorphous SiCN subjected to pyrolysis at 1 300 ℃ exhibits the highest piezoresistivity coefficient (310~416), and the corresponding electrical resistance value shows a sharp drop trend followed by a gradual flattening with the stress. The amorphous SiCN still exhibits excellent piezoresistive performances and stability at a high temperature up to 900 ℃, promising a potential application in the field of high-temperature pressure sensors.
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Key words:
- high-temperature sensing /
- amorphous SiCN /
- nanoindentation /
- creep /
- piezoresistive effect
otherother(Recommended by TIAN Kuo, M.AMM Youth Editorial Board)
1) （我刊青年编委田阔推荐） -
图 1 非晶SiCN的微观形貌与密度变化
Figure 1. The microscopic morphology and density changes of the amorphous SiCN
图 2 非晶SiCN的XRD图谱、Raman光谱以及不同热解温度下的Raman光谱参数
注 为了解释图中的颜色，读者可以参考本文的电子网页版本，后同.
Figure 2. XRD spectra, Raman spectra and Raman spectrum parameters of the amorphous SiCN at different pyrolysis temperatures
图 4 斜率拟合曲线以及对应的弹性模量和硬度
Figure 4. Slope fitting curves and corresponding elastic modulus and hardness curves
图 6 不同热解温度非晶SiCN的应力-应变速率曲线与应变指数
Figure 6. Stress strain rate curves and strain indexes of curves amorphous SiCN at different pyrolysis temperatures
图 7 不同热解温度非晶SiCN的应力-电阻曲线
Figure 7. Piezoresistive plots of the amorphous SiCN at different pyrolysis temperatures
图 8 amorphous P1300-SiCN的压阻系数及稳定性测试
Figure 8. The stability test under cyclic loading and piezoresistive coefficients of the amorphous P1300-SiCN
图 9 P1300非晶SiCN在不同温度下的I/V曲线
Figure 9. I/V curves of the amorphous SiCN at different temperatures
图 10 不同测试温度下的压阻响应
Figure 10. The piezoresistive responses at different testing temperatures
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